High power pulsed magnetron sputtering (HiPIMS) is a technique that involves applying a high peak voltage in short pulses. These pulses are typically very brief, lasting between 50 to 200 microseconds. The frequency of these pulses is around 500 Hz. The duty cycle, which is the ratio of the "on" time to the "off" time, is usually less than 10%. This means that the system spends most of its time in the "off" state.
4 Key Factors Explained
1. High Peak Voltage
The voltage applied in HiPIMS is characterized by high peak values. This high voltage is essential to achieve the high power densities needed for efficient sputtering. The exact voltage can vary depending on the specific setup and materials involved. However, it generally falls within the range of 100V to 3kV.
2. Short Pulse Durations
The pulses in HiPIMS are very short, typically between 50 to 200 microseconds. This short duration allows for the concentration of energy into a brief period. This enhances the ionization of the sputtered particles and leads to a higher degree of ionization compared to continuous DC sputtering. This high degree of ionization is beneficial for improving the film quality and adhesion.
3. Low Frequency and Duty Cycle
The frequency of the pulses in HiPIMS is relatively low, around 500 Hz, and the duty cycle is less than 10%. A low duty cycle means that the system spends most of its time in the "off" state. This allows for cooling and stabilization between pulses. This intermittent operation helps in controlling the temperature and preventing thermal damage to the target and substrate.
4. Operational Modes
Depending on the pulse duration and frequency, the HiPIMS system can operate in either voltage mode or current mode. In voltage mode, which is typical for shorter pulses and higher frequencies, the focus is on rapid voltage changes to accelerate ions. In current mode, which is more common with longer pulses and lower frequencies, the system maintains a constant current to sustain the sputtering process.
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